RESEARCH HOME RESEARCH MEMS / NANO / MATERIAL TECHNOlOGIES MEMS / Nano / Material Technologies RESEARCH INTERESTS Actuators and Sensors CHEN Shih-Chi, LIAO Wei-Hsin Lab-on-a-chip ZHANG Li MEMS/NEMS ZHANG Li Micro-and Nanofabrication ZHANG Li, ZI Yunlong Micro-and Nano-positioning LIAO Wei-Hsin Micro-opto-electro-mechanical Systems (MOEMS) CHEN Shih-Chi Modeling and Control of Nano-and Micro-systems YUAN Haidong Multifunctional Composites LIAO Wei-Hsin, ZHANG Weizhao Nanomechanics ZHANG Li, ZI Yunlong Nanoscale Heat Transfer XU Dongyan Smart Materials and Structures LIAO Wei-Hsin Quantum Sensors YUAN Haidong Soft Lithography LIAO Wei-Hsin Thin Film Technology ZHANG Li KEY PEOPLE CHEN Shih-Chi 陳世祈 LIAO Wei-Hsin 廖維新 XU Dongyan 徐東艷 YUAN Haidong 袁海東 ZHANG Li 張立 ZHANG Weizhao 張為昭 ZI Yunlong 訾雲龍